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Oil-Free LM Guide for Special Environments

Optimal for use in a vacuum environment where oil cannot be used.

A special oil-free LM guide optimized for use in high vacuum environments where oil cannot be used. It utilizes a newly developed fixed lubrication S film for the rolling elements. Additionally, since no grease is used and all components are made of stainless steel, it achieves low outgassing and low dust generation.

  • Oxidation/Diffusion Device
  • Ion implantation equipment
  • Other clean room equipment and facilities

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THK Oil-Free LM Guide Product Catalog

It reaches a vacuum level of 10^-6 [Pa] and is suitable for areas that dislike chemical contamination (gaseous pollutants such as organic substances and moisture).

Optimal for use in a vacuum environment where oil cannot be used (up to 10^-6 [Pa]) Newly developed: Solid lubrication S film used Low dust generation and low outgassing

  • Anti-vibration, earthquake-proof, vibration-isolating devices

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